SUPPLIER OF GAS PHASE ORGANOMETAL COMPOUND

摘要

The present invention relates to a device to supply organometallic compound gas. More specifically, the present invention includes: a case having an inner receiving space; a raw material container located in the inner receiving space of the case, receives a solid-phase organometallic compound, and has creases; a carrier gas supply line which supplies carrier gas to the raw material container; and a carrier gas discharge line which discharges gas containing organometallic compound generated in the raw material container.