SUSPENSION AND ABSORBER STRUCTURE FOR BOLOMETER

摘要

A semiconductor device includes a substrate having an upper surface that defines a sensing region. A fixed beam structure is supported at a first level above the sensing region. The fixed beam structure includes fixed beam supports that extend upwardly from the upper surface of the substrate to position the fixed beam structure at the first level above the sensing region. An absorber structure is supported above the fixed beam structure at a second level above the sensing region. The absorber structure includes a pillar support that extends upwardly from the fixed beam structure to position the absorber structure at the second level above the sensing region.

主权项

1. A semiconductor device comprising:
a substrate having an upper surface that defines a sensing region; a fixed beam structure supported at a first level above the sensing region, the fixed beam structure including fixed beam supports that extend upwardly from the upper surface of the substrate to position the fixed beam structure at the first level above the sensing region; an absorber structure supported above the fixed beam structure at a second level above the sensing region, the absorber structure including a pillar support that extends upwardly from the fixed beam structure to position the absorber structure at the second level above the sensing region.