| 发明名称 |
COLD TRAP AND MOUNTING STRUCTURE OF COLD TRAP |
| 摘要 |
A cold trap includes a duct, which is for connecting a volume to be evacuated to a vacuum pump, and a cold panel surrounded by the duct. The duct includes an inlet flange at an evacuation target side and an outlet flange at a vacuum pump side. The outlet flange is arranged at a distance from the inlet flange in the extending direction of the duct. The inlet flange has an outer diameter larger than an outer diameter of the outlet flange. |
| 申请公布号 |
US2014174108(A1) |
申请公布日期 |
2014.06.26 |
| 申请号 |
US201314138620 |
申请日期 |
2013.12.23 |
| 申请人 |
SUMITOMO HEAVY INDUSTRIES, LTD. |
发明人 |
Oikawa Ken |
| 分类号 |
B01D8/00;F16L21/00 |
主分类号 |
B01D8/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A cold trap provided between a volume to be evacuated and a vacuum pump for evacuation of the volume, the cold trap comprising:
a duct configured to connect the volume to the vacuum pump; and a cold panel surrounded by the duct, wherein the duct comprises an inlet flange arranged toward the volume to be evacuated and an outlet flange arranged toward the vacuum pump, the outlet flange is arranged at a distance from the inlet flange in an extending direction of the duct, and the inlet flange has an outer diameter larger than an outer diameter of the outlet flange. |
| 地址 |
Tokyo JP |
