HIGH FLOW XEF2 CANISTER

摘要

This disclosure provides systems, methods and apparatus for delivery of gas from solid phase sources. A solid phase gas source canister can include multiple separated volumes configured to contain multiple quantities of a solid phase gas source. Sublimated vapor can be independently produced by each quantity of the solid phase gas source. In some implementations, the solid phase gas source canisters are configured for simultaneous fill of the multiple volumes with a solid source gas phase powder.

主权项

1. A solid phase source gas delivery system comprising:
a cylindrical inner container including a plurality of separated volumes configured to contain a plurality of separated quantities of a solid phase gas source, the volumes separated by shelves configured to support the quantities of the solid phase gas source; a central tube extending through the inner container in fluid communication with the separated volumes; and a side cover movable to access the separated volumes.