Interferometer

摘要

An interferometer includes a light source and a beam splitter, via which the beam of rays emitted by the light source is split into a measurement beam and a reference beam. The measurement beam propagates in a measuring arm extending in a first direction between the beam splitter and a measuring reflector. The measuring reflector brings about an offset perpendicular to the direction of incidence between the measurement beam falling on it and the measurement beam reflected back by it. In a reference arm extending in a second direction, the reference beam propagates between the beam splitter and a reference reflector. In addition, the interferometer has a detector system, to which the superposed and recombined measurement beam and reference beam are able to be supplied, and via which a distance-dependent interference signal with respect to the position of the measuring reflector is able to be generated. The measuring reflector in each case includes at least one transmission grating as well as a reflector element.

主权项

1. An interferometer, comprising
a light source adapted to emit a beam of rays; a beam splitter adapted to split the beam of rays emitted by the light source into a measurement beam and a reference beam; a measuring arm extending in a first direction, in which the measurement beam propagates between the beam splitter and a measuring reflector, the measuring reflector adapted to bring about an offset perpendicular to a direction of incidence between the measurement beam that impinges on the measuring reflector and the measurement beam that is reflected back by the measuring reflector; a reference arm extending in a second direction, in which the reference beam propagates between the beam splitter and a reference reflector; and a detector system, to which superposed and recombined measurement beam and reference beam are suppliable, and adapted to generate a distance-dependent interference signal with respect to a position of the measuring reflector; wherein the measuring reflector includes at least one transmission grating and reflector element.