发明名称 BALL FILLING DEVICE AND METHOD
摘要 The present invention provides a ball filling device (10). The device (10) is operated, in a condition that a mask (111) for disposing conductive balls (B) into a plurality of openings (111) defined in a substrate (100) is positioned on the substrate (100), to fill the conductive balls (B) into the plurality of openings (111), and comprises a plurality of heads (21a, 21b) that respectively retain independent groups (Bg1, Bg2) of plural conductive balls on a plurality of portions of a surface (111a) of the mask (110), and a head moving mechanism (30) for moving the plurality of heads (21a, 21b) to have the groups (Bg1, Bg2) of plural conductive balls moving on the surface (110a) of the mask (110).
申请公布号 KR101411582(B1) 申请公布日期 2014.06.25
申请号 KR20070069057 申请日期 2007.07.10
申请人 发明人
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
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