MEMS modeling system and method

摘要

A system and method for modeling microelectromechanical devices is disclosed. An embodiment includes separating the microelectromechanical design into separate regions and modeling the separate regions separately. Parametric parameters or parametric equations may be utilized in the separate models. The separate models may be integrated into a MEMS device model. The MEMS device model may be tested and calibrated, and then may be used to model new designs for microelectromechanical devices.

主权项

1. A method for modeling microelectromechanical devices, the method comprising:
separating a MEMS design into a plurality of regions, each of the plurality of regions being structural regions capable of being stored within a two-dimensional mask database, at least one of the plurality of regions being in a separate dummy layer than another one of the plurality of regions; developing a model for each of the plurality of regions; and entering the model for each of the plurality of regions into a MEMS model on a processing system.