Particle beam system

摘要

A particle beam system includes a particle beam source for generating a particle beam, a high voltage source, a beam blanker system with deflection plates 56, 57, and a control circuit. The control circuit provides a first current path 67 between the two deflection plates, wherein a switch 70, a node 72 connected to the high voltage source and a switch 76 are arranged in this order in the first current path starting from the deflection plate 56. The control circuit provides a second current path 85 between the deflection plate 56 and the deflection plate 57, wherein in the second current path, starting from the deflection plate 56, a series connection 88 comprising a voltage source 91 a switch 90, a node 86 connected to the high voltage source and a series connection 92 comprising a voltage source 95 and a switch 94 are arranged in this order.

主权项

1. A particle beam system comprising:
a particle beam source configured to generate a particle beam; a high voltage source; and a beam blanker system comprising a pair of deflection plates and a control circuit; wherein a beam path of the particle beam extends between a first deflection plate of the pair of deflection plates and a second deflection plate of the pair of deflection plates; wherein the control circuit comprises a first switch, a second switch and a first node connected to an output terminal of the high voltage source; wherein the control circuit provides a first current path between the first deflection plate and the second deflection plate; wherein the first deflection plate, the first switch, the first node, the second switch and the second deflection plate are arranged in the first current path in this order; wherein the control circuit further comprises a first switchable voltage source, a second switchable voltage source and a second node connected to the output terminal of the high voltage source; wherein the control circuit further provides a second current path between the first deflection plate and the second deflection plate; and wherein the first deflection plate, the first switchable voltage source, the second node, the second switchable voltage source and the second deflection plate are arranged in the second current path in this order.