DEPOSITING LITHIUM METAL OXIDE ON A BATTERY SUBSTRATE

摘要

A method of depositing lithium metal oxide on a battery substrate in a sputtering chamber comprising a substrate support, first and second sputtering targets each comprising lithium metal oxide, and first and second electrodes about the backside surfaces of the first and second sputtering targets respectively. In the method, a substrate is placed on the substrate support, sputtering gas maintained at a pressure and energized by applying an alternating voltage of AC power to the first and second electrodes so that each electrode is alternately either an anode or a cathode. The alternating voltage can be applied within a frequency range while also applying a time varying magnetic field about each of the surfaces of the first and second targets.

主权项

1. A method of depositing lithium metal oxide on a battery substrate, in a sputtering chamber comprising (i) a substrate support, (ii) first and second sputtering targets each comprising a sputtering surface of lithium metal oxide and having a backside surface, and (iii) a first electrode about the backside surface of the first sputtering target and a second electrode about the backside surface of the second sputtering target, the method comprising:
(a) placing one or more substrates on the substrate support in the sputtering chamber; (b) maintaining a sputtering gas at a pressure in the sputtering chamber; (c) energizing the sputtering gas by applying an alternating voltage of AC power to the first and second electrodes so that each electrode is alternately either an anode or a cathode, the alternating voltage being applied at a frequency of between about 10 and about 100 kHz; and (d) applying a time varying magnetic field about each of the sputtering surfaces of the first and second targets.