发明名称 FINFET WITH MERGE-FREE FINS
摘要 <p>A semiconductor device comprises an insulation layer, an active semiconductor layer formed on an upper surface of the insulation layer, and a plurality of fins formed on the insulation layer. The fins are formed in the gate and spacer regions between a first source/drain region and second source/drain region, without extending into the first and second source/drain regions.</p>
申请公布号 WO2014092846(A1) 申请公布日期 2014.06.19
申请号 WO2013US63794 申请日期 2013.10.08
申请人 INTERNATIONAL BUSINESS MACHINES 发明人 HE, HONG;TSENG, CHIAHSUN;WANG, JUNLI;YEH, CHUN-CHEN;YIN, YUNPENG
分类号 H01L29/786;H01L21/28 主分类号 H01L29/786
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