ELECTROMAGNETIC WAVE MEASUREMENT DEVICE, MEASUREMENT METHOD, AND RECORDING MEDIUM

摘要

According to the present invention, an electromagnetic wave measurement device includes: an electromagnetic wave detector, a frequency component acquisition unit, and a thickness indication quantity deriving unit. An object to be measured is disposed on a substrate and includes at least two layers, and the electromagnetic wave detector detects a substrate-surface-reflected electromagnetic wave which has been made incident to the object, has been reflected by the substrate, and has passed through the object. The frequency component acquisition unit acquires an amplitude of a frequency component of the substrate-surface-reflected electromagnetic wave. The thickness indication quantity deriving unit derives a thickness indication quantity based on the amplitude of the frequency component of the substrate-surface-reflected electromagnetic wave and a relationship between the thickness indication quantity and the amplitude of the frequency component of the substrate-surface-reflected electromagnetic wave.

主权项

1. An electromagnetic wave measurement device comprising:
an electromagnetic wave output device that outputs an electromagnetic wave having a frequency between 0.01 [THz] and 100 [THz] toward an object to be measured disposed on a substrate and including at least two layers; an electromagnetic wave detector that detects a substrate-surface-reflected electromagnetic wave which has been made incident to the object to be measured, has been reflected by the substrate, and has passed through the object to be measured; a frequency component acquisition unit that acquires an amplitude of a frequency component of the substrate-surface-reflected electromagnetic wave detected by the electromagnetic wave detector; a thickness/amplitude characteristic recording unit that records a relationship between a thickness indication quantity representing a thickness of at least any one of the layers of the object to be measured, and the amplitude of the frequency component of the substrate-surface-reflected electromagnetic wave; and a thickness indication quantity deriving unit that derives a thickness indication quantity based on the amplitude of the frequency component of the substrate-surface-reflected electromagnetic wave acquired by the frequency component acquisition unit and the recorded content of the thickness/amplitude characteristic recording unit.