发明名称 SEMICONDUCTOR DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To provide a peeling method without causing a damage on a peeling layer thereby to enable peeling of not only the peeling layer of a small area but also the peeling layer of a large area all over with high yield; and provide a semiconductor device which achieves a light weight by attaching the peeling layer to various base materials and a manufacturing method of the semiconductor device; and provide a semiconductor device which achieves a light weight by attaching various elements represented by a TFT to a flexible film and a manufacturing method of the semiconductor device.SOLUTION: A semiconductor device comprises: a first material layer 11 arranged on a substrate; and a second material layer 12 arranged in contact with the first material layer 11. In the case where the first material layer before peeling has a tensile stress even when deposition by lamination or a heat treatment at a temperature of 500°C and over or an irradiation treatment by laser beams is performed and the second material layer has a compression stress, the first material layer can be successfully and easily separated in a layer of or at a boundary surface with the second material layer 12 by physical means.</p>
申请公布号 JP2014112679(A) 申请公布日期 2014.06.19
申请号 JP20130247349 申请日期 2013.11.29
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 TAKAYAMA TORU;MARUYAMA JUNYA;YAMAZAKI SHUNPEI
分类号 H01L27/12;H01L29/786;G02F1/1368;H01L21/02;H01L21/20;H01L21/265;H01L21/336;H01L21/762;H01L21/77;H01L21/84;H01L51/50;H05B33/10;H05B33/22 主分类号 H01L27/12
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