| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump that has a long operating life while being able to be reliably operated at high gas load and conveyance speed, and can be manufactured at low cost.SOLUTION: At least one component 30 of a vacuum pump is made of a material including metal and nanoparticles, and one stator and at least one rotor mechanism 30 are provided. The rotor mechanism 30 is rotatably supported with respect to the stator. In addition, the metal includes an alloy such as aluminum, especially a certain type of aluminum alloy. |
