发明名称 |
MICRO PICK UP ARRAY WITH INTEGRATED PIVOT MOUNT |
摘要 |
<p>Systems and methods for transferring a micro device from a carrier substrate are disclosed. In an embodiment, a micro pick up array structure allows the micro pick up array to automatically align with the carrier substrate. Deflection of the micro pick up array may be detected to control further movement of the micro pick up array.</p> |
申请公布号 |
WO2014093243(A1) |
申请公布日期 |
2014.06.19 |
申请号 |
WO2013US73919 |
申请日期 |
2013.12.09 |
申请人 |
LUXVUE TECHNOLOGY CORPORATION |
发明人 |
GOLDA, DARIUSZ;HIGGINSON, JOHN A.;BIBL, ANDREAS |
分类号 |
B81B7/00;B81C3/00;H01L21/677 |
主分类号 |
B81B7/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|