| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck which allows for equalization of insulation properties and electrostatic attraction, while reducing the occurrence frequency of peeling, or the like, on the bonding surface of a base and an insulator, and to provide a manufacturing method therefor.SOLUTION: A base 10 constituting an electrostatic chuck is composed of an Al-SiC composite material having an open porosity of 0.5% or less, and an Al content in a range of 60-90 wt%. An insulator 20 bonded to the base 10 is composed of a ceramic sprayed film using AlOor YOas a raw material. |
