Memory Gate Landing Pad Made From Dummy Features

摘要

Embodiments described herein generally relate to landing gate pads for contacts and manufacturing methods therefor. A bridge is formed between two features to allow a contact to be disposed, at least partially, on the bridge. Landing the contact on the bridge avoids additional manufacturing steps to create a target for a contact.

主权项

1. A semiconductor device, comprising:
a substrate; a first memory cell gate on the substrate; a dummy feature on the substrate; a counterpart memory cell gate on the substrate, wherein the counterpart memory cell gate is located between two features so as to faun a bridge portion that is below opposing edges of the two features; and a contact at least partially on the bridge portion.