发明名称 APPARATUS, SYSTEM, AND METHOD FOR SEPARATING GASES AND MITIGATING DEBRIS IN A CONTROLLED PRESSURE ENVIRONMENT
摘要 An assembly, including: a nozzle including a first chamber with a first orifice arranged to receive a stream of gas; a second chamber with a second orifice to emit the stream; a throat connecting the nozzle chambers; and a collector including: top and bottom walls with first and second openings; a third chamber bounded by the top and bottom walls and including a third opening connected to the second orifice to receive the stream; and a fourth opening. The first chamber tapers from the first orifice to the throat. The second chamber expands in size from the throat to the second orifice. The third chamber expands in size from the third opening to the fourth opening. The collector is arranged to: entrain, in the stream, debris entering the third chamber through first or second opening; and emit the stream, with the entrained debris, from the fourth opening.
申请公布号 US2014166051(A1) 申请公布日期 2014.06.19
申请号 US201314105986 申请日期 2013.12.13
申请人 KLA-Tencor Corporation 发明人 Umstadter Karl R.;Kanouff Michael P.;Garcia Rudy;Romero Mike
分类号 B05B1/00 主分类号 B05B1/00
代理机构 代理人
主权项 1. A nozzle for producing a controlled gas stream in a low pressure environment, comprising: a first chamber with a first orifice arranged for connection to a source of gas and to receive a stream of gas from the source; a second chamber with a second orifice arranged to emit the stream; a throat connecting the first and second chambers; and, a longitudinal axis extending from the first orifice to the second orifice in a first direction, wherein: the first chamber tapers from the first orifice to the throat; and,the second chamber expands in size from the throat to the second orifice.
地址 Milpitas CA US