| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow rate standard for accurately calibrating a flowmeter whose flow rate range is small in a short time. SOLUTION: A flow rate standard includes: a first channel pipe whose one end side is connected to a pressure source, and to whose other end a flow rate controller is connected; a second channel pipe whose one end side is connected to the pressure source, and whose other end is connected to the first channel pipe, and which is equipped with a connection port to which a test object flowmeter is serially connected in the channel; interruption means for interrupting the supply of gas from the pressure source to the first channel pipe and the supply of gas from the pressure source to the second channel pipe, and for separating the first channel pipe and the second channel pipe at the upstream side of the connection port. By using the flow rate standard, compressed gas is packed from the pressure source into the flow rate standard, and then when the pressure source and the flow rate standard are interrupted, the flow of gas whose flow rate is fine can be accurately generated from the upstream side to the downstream side of the test object flowmeter. This fine flow rate can be calculated from the flow rate generated by the flow rate controller and the volume ratio of the upstream side and the downstream side of the flowmeter. COPYRIGHT: (C)2012,JPO&INPIT |
