发明名称 METHOD OF FABRICATING AN INERTIAL SENSOR
摘要 An inertial sensor including at least one measurement beam and one active body formed of a proof body and of deformable plates, said active body being maintained in suspension inside of a tight enclosure via its plates, the measurement beam connecting a portion of the proof body to an internal wall of said enclosure, said measurement beam having a lower thickness than the proof body.
申请公布号 KR20140074865(A) 申请公布日期 2014.06.18
申请号 KR20137022957 申请日期 2012.02.02
申请人 TRONIC'S MICROSYSTEMS 发明人 RENARD STEPHANE;FILIPE ANTOINE;COLLET JOEL
分类号 G01P15/08;B81B7/02;B81C1/00;G01P1/02;G01P15/097;G01P15/12 主分类号 G01P15/08
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