Pyroelectric element and method for manufacturing the same

摘要

A pyroelectric element includes a pyroelectric substrate; a light-receiving section composed of a front-side electrode, a back-side electrode, and a light-receiving portion; and a light-receiving section composed of a front-side electrode, a back-side electrode, and a light-receiving portion. Since the pyroelectric substrate warps in a cavity-facing region opposite a cavity, the light-receiving area of the light-receiving sections is greater than that in the case where there is no warp. It is thus possible to improve detection sensitivity of the pyroelectric element without making the size of the pyroelectric element larger than that in the case where there is no warp.

主权项

1. A pyroelectric element comprising:
a pyroelectric substrate; a supporting member having a cavity and configured to support the pyroelectric substrate from a back side of the pyroelectric substrate at a portion other than the cavity; and a plurality of light-receiving sections, each light-receiving section including a front-side electrode, a back-side electrode, and a portion of the pyroelectric substrate interposed between the front-side and back-side electrodes, wherein the front-side electrode is formed on a front side of a cavity-facing region of the pyroelectric substrate and the back-side electrode is formed on the back side of the cavity-facing region of the pyroelectric substrate, the cavity-facing region being a region of the pyroelectric substrate opposite the cavity, wherein the pyroelectric substrate warps in the cavity-facing region and is thinner at a crest of the warped substrate than at remaining portions of the warped substrate.