Element array with a plurality of electromechanical conversion devices

摘要

An element array comprises a plurality of elements having a first electrode and a second electrode with a gap therebetween; the first electrode is separated for each of the elements by grooves, an insulating connection substrate is bonded to the first electrode, and wirings are provided from the respective first electrodes through the connection substrate to the side opposite to the first electrodes.

主权项

1. An electromechanical conversion device comprising:
an element substrate including a plurality of elements, each of said elements having a first electrode, a second electrode, and a support disposed on said first electrode so as to interpose a gap between said first electrode and said second electrode; a circuit substrate; and an insulating connection substrate configured to fix said element substrate and said circuit substrate, said connection substrate being provided with wiring, wherein said first electrode and said circuit substrate are connected electrically by said wiring.