| 摘要 |
Disclosed is a pre-alignment apparatus, with which the size of the whole exposure unit can be reduced, and a tact time can be shortened. Also disclosed is a pre-alignment method. The pre-alignment apparatus (20) has a substrate temperature control mechanism, which controls the temperature of a substrate (W) placed on a precision temperature control plate (22), and a foreign material detecting mechanism (34), which detects foreign materials on the substrate placed on the precision temperature control plate (22). Thus, the pre-alignment apparatus (20), the substrate temperature control mechanism and the foreign material detecting mechanism are integrated into a single apparatus, the number of transfer robots is reduced, and the size of the whole exposure unit is reduced. Furthermore, the tact time is shortened by performing the pre-alignment and the foreign material detection to the substrate having the temperature thereof being controlled. |
