Method for inspecting UV illuminance in multi-level bake furnace for TFT-LCD manufacturing process and pickup assembly device for performing the method

摘要

The present invention provides a method for inspecting UV illuminance in multi-level UV bake furnace for TFT-LCD manufacturing process and a pickup assembly device for performing the method. The method for inspecting UV illuminance in multi-level UV bake furnace for TFT-LCD manufacturing process includes the following steps: Step 1: providing a multi-level bake furnace for TFT-LCD manufacturing process, a pickup device, an inspection control system, and a sensor for inspecting UV illuminance; Step 2: mounting the sensor on the pickup device; Step 3: connecting the inspection control system and the sensor with communication; Step 4: operating the pickup device to bring the sensor to a site in a level of the multi-level UV bake furnace where inspection of UV illuminance is to be made; and Step 5: sensor collecting data and transmitting the data so collected to the inspection control system to thereby realize inspection. The pickup assembly device includes a pickup device and a sensor mounted to the pickup device.

主权项

1. A method for inspecting UV (Ultraviolet) illuminance in multi-level UV bake furnace for TFT-LCD (Thin Film Transistor Liquid Crystal Display) manufacturing process, comprising the following steps:
Step 1: providing a multi-level bake furnace for TFT-LCD manufacturing process, a pickup device, an inspection control system, and a sensor for inspecting UV illuminance; Step 2: mounting the sensor on the pickup device; Step 3: connecting the inspection control system and the sensor with communication; Step 4: operating the pickup device to bring the sensor to a site in a level of the multi-level UV bake furnace where inspection of UV illuminance is to be made; and Step 5: the sensor collecting data and transmitting the data as being collected to the inspection control system to thereby realize inspection.