| 摘要 |
The present invention relates to a vertical type wafer transfer conveyor. The vertical type wafer transfer conveyor according to the present invention comprises: pulleys which are rotated by a motor and arranged on the upper and lower parts mutually connected by a timing belt; a cassette which is moved by being connected with the timing belt and which has a wafer mounted thereon; rails which are disposed on the outside of the timing belt and which guide the cassettes. As mentioned above, the present invention provides the vertical type wafer transfer conveyor having the advantages in moving multiple cassettes storing wafers along a predetermined track, in taking out various kinds and numbers of wafers from the cassettes as needed and in maximizing the effect from the minimum space (area) by rotating the cassettes in the longitudinal direction as compared with existing cassettes moving in the transverse direction. |
