HIGH FREQUENCY HEATING APPARATUS

摘要

The present invention relates to a high frequency heating device, and more specifically, to a high frequency heating device which heats a substrate using high frequency. For this, the present invention relates to the high frequency heating device which includes a plurality of high frequency generators for heating a substrate using high frequency. The high frequency generators are arranged with an interval of n/2 *λ, wherein n is 1 to 12 andλis a high frequency wavelength generated by the high frequency generators.