SENSORE MAGNETORESISTIVO INTEGRATO IN UNA PIASTRINA PER IL RILEVAMENTO DI CAMPI MAGNETICI PERPENDICOLARI ALLA PIASTRINA NONCHE' SUO PROCEDIMENTO DI FABBRICAZIONE

摘要

An integrated magnetoresistive sensor, formed in a chip including a substrate having a surface and an insulating region covering the surface of the substrate. A magnetoresistor, of a first ferromagnetic material, is formed in the insulating region and has a sensitivity plane parallel to the surface. A concentrator of a second ferromagnetic material is formed in the substrate and has at least one arm extending in a transverse direction to the sensitivity plane. The arm has one end in contact with the magnetoresistor.