发明名称 DOCKING BLOCK UNIT
摘要 The present invention relates to a docking block unit. The docking block unit according to the present invention comprises a first docking block part on one side of a first treatment device for treating a predetermined process; a second docking block part disposed on one side of a second treatment device adjacent to the first treatment device and connected to the first docking block part; an alignment unit for aligning the first and second treatment devices; and a transmission preventing unit for preventing vibration generated by the first treatment device from being transmitted to the second treatment device.
申请公布号 KR20140072656(A) 申请公布日期 2014.06.13
申请号 KR20120140418 申请日期 2012.12.05
申请人 HANMISEMICONDUCTOR CO., LTD. 发明人 KWAK, NOH KWON
分类号 H01L21/02;H01L21/78 主分类号 H01L21/02
代理机构 代理人
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