| 发明名称 |
MEMS ELEMENT, ELECTRONIC DEVICE, ALTIMETER, ELECTRONIC APPARATUS, AND MOVING OBJECT |
| 摘要 |
A MEMS element includes a substrate which includes a flexible portion, a fixation electrode which is provided on a principal surface of the substrate, and a movable electrode which includes a movable portion which is separated from the fixation electrode, overlaps with at least a portion of the fixation electrode in a plan view of the principal surface, and is driven in a direction intersecting the principal surface, and a fixation end connected to the principal surface. The fixation electrode and the movable electrode is disposed to correspond to the flexible portion. |
| 申请公布号 |
US2014157893(A1) |
申请公布日期 |
2014.06.12 |
| 申请号 |
US201314097526 |
申请日期 |
2013.12.05 |
| 申请人 |
Seiko Epson Corporation |
发明人 |
MATSUZAWA Yusuke;CHINO Yuji |
| 分类号 |
H02N1/08;G01C5/06;B81B7/02 |
主分类号 |
H02N1/08 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A MEMS element comprising:
a substrate which includes a flexible portion; a fixation electrode which is provided on a principal surface of the substrate; and a movable electrode which includes a movable portion which is separated from the fixation electrode, overlaps with at least a portion of the fixation electrode in a plan view of the principal surface, and is driven in a direction intersecting the principal surface, and a fixation end connected to the principal surface, wherein the fixation electrode and the movable electrode are disposed to correspond to the flexible portion.
|
| 地址 |
Tokyo JP |
