Silicon substrate, has reactive multilayer comprising two-dimensional nanosheets made of different materials, and insulating layer arranged between upper cap substrate and reactive multilayer and connected with lower substrate

摘要

The substrate has a bonding layer system arranged on both surfaces of an upper cap substrate (1). A reactive multilayer (7) comprises two alternating two-dimensional nanosheets made of different materials. An insulating layer is arranged between the upper cap substrate and the reactive multilayer that are thermally decoupled. The upper cap substrate is connected to an active element (4) to hermetically encapsulate the substrates. The insulating layer is extensively connected with a lower substrate (2). An insulating layer is made of oxide, carbide or nitride or transition metal. Independent claims are also included for the following: (1) a device for providing ignition and reaction transmission in reactive multilayer system (2) a method for providing ignition and reaction transmission in reactive multilayer system.