| 摘要 |
PROBLEM TO BE SOLVED: To enable a usage suitable for a use in accordance with reliability in obtained data on a measurement point.SOLUTION: The measurement microscope device comprises: height image acquisition means for acquiring a height image having height information on the basis of a plurality of fringe images; display means for causing the height image to be displayed; measurement means for performing a measurement to the height image displayed on the display means; storage means for storing the height information and attribute information indicative of reliability in the height information by an attribute unit of one or more pixels constituting the height image acquired by the height image acquisition means; and attribute information designation means for designating whether to use the height information on each attribute unit when the measurement is performed by the measurement means, and whether to display the height information on each attribute unit when displayed on the display means in accordance with the attribute information stored in the storage means. |
