Synthesis and Characterization of First Row Transition Metal Complexes Containing alpha-keto Hydrazonate Ligands as Potential Precursors for Use in Metal Film Deposition

摘要

A compound that is useful for forming a metal by reaction with a reducing agent is described by formula (I):;;wherein
M is a metal selected from Groups 3 through 12 of the Periodic Table;R1 and R2 are each independently H or C1-C6 alkyl; andR3 is H or C1-C8. alkyl.

主权项

1. A compound having formula (I):wherein
M is a metal selected from Groups 2 to 12 of the Periodic Table; R1 and R2 are each independently H or C1-C6 alkyl; and R3 is H or H or C1-C8 alkyl.