发明名称 THIN FILM TRANSISTOR WITH TWO-DIMENSIONAL DOPING ARRAY
摘要 A thin film transistor includes: a source region; a drain region; and a polycrystalline thin film active channel region connected to the source region and the drain region, the active channel region comprising grains and being doped with a two-dimensional pattern comprising a plurality of doped regions, the plurality of doped regions each comprising at least portions of a plurality of the grains and at least one grain boundary.
申请公布号 US2014159039(A1) 申请公布日期 2014.06.12
申请号 US201314104762 申请日期 2013.12.12
申请人 The Hong Kong University of Science and Technology 发明人 KWOK Hoi Sing;ZHANG Meng;CHEN Shuming;ZHOU Wei;WONG Man
分类号 H01L29/786;H01L29/66 主分类号 H01L29/786
代理机构 代理人
主权项 1. A thin film transistor, comprising: a source region; a drain region; and a polycrystalline thin film active channel region connected to the source region and the drain region, the active channel region comprising grains and being doped with a two-dimensional pattern comprising a plurality of doped regions, the plurality of doped regions each comprising at least portions of a plurality of the grains and at least one grain boundary.
地址 Hong Kong CN