发明名称 MINIMAL MANUFACTURING DEVICE, PRODUCTION LINE AND METHOD OF REARRANGING PRODUCTION LINE
摘要 PROBLEM TO BE SOLVED: To quickly, safely and securely rearrange a production line using minimal manufacturing devices.SOLUTION: A pair of leg parts is provided in parallel in portions positioned right below a left side wall and a right side wall of a bottom plate 36 of a minimal manufacturing device body. A space to which a lifting mechanism 25 of a conveyance device 14 is inserted is formed in a portion sandwiched by the pair of leg parts right below the bottom plate 36. A fixing structure 16 for supporting the bottom plate 36 is provided on a floor surface. A position leg 42 and a connection mechanism 71 are provided on the pair of leg parts and the bottom plate. A V-groove base 66 is provided on the position facing the positioning leg 42 on the fixing structure 16. The positioning leg 42 is brought into contact with the V-groove base 66 to position and support the bottom plate 36 when the bottom plate 36 descends toward the fixing structure 16.
申请公布号 JP2014110359(A) 申请公布日期 2014.06.12
申请号 JP20120264850 申请日期 2012.12.04
申请人 NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL & TECHNOLOGY;DESIGN NETWORK CO LTD 发明人 HARA SHIRO;MAEKAWA HITOSHI;NAKANO ZEN;KUMPUAN SOMAWANG;FUTAGAWA SHINJI;IIDA MINORU
分类号 H01L21/02 主分类号 H01L21/02
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