MONOLITHICALLY INTEGRATED RF SYSTEM AND METHOD OF MAKING SAME

摘要

Radio frequency system (250) which includes a first and second sub-assembly (100, 200), each formed of a plurality of layers of conductive material (504, 508, 516) disposed on a substrate (102) and arranged in a stack. The stacked layers form signal processing components (108, 110) and at least one peripheral wall (104, 204) surrounding a walled area (118, 218) of each substrate. The second sub-assembly is positioned on the first sub-assembly with a first walled area of a first substrate aligned with a second walled area of a second substrate.

主权项

1. A method for constructing an RF device, comprising:
forming a first sub-assembly by
first depositing on a first surface of a first substrate a first plurality of layers including at least one layer each of a conductive material and a sacrificial material; andfirst controlling said deposit of said first plurality of layers to form on said first surface
at least a first peripheral wall surrounding a first walled area of said first substrate, said first peripheral wall extending a predetermined distance away from said first surface to form a first ledge, andat least one first signal processing component disposed on said first surface of said first substrate within said walled area; forming a second sub-assembly by
second depositing on a second surface of a second substrate a second plurality of layers including at least one layer each of said conductive material and said sacrificial material; andsecond controlling said deposit of said second plurality of layers to form on said second surface at least one second signal processing component within a second walled area; andpositioning said second sub-assembly on said first sub-assembly with said first walled area aligned with said second walled area.