发明名称 Carbon Nano Tube Coating Method
摘要 The present invention provides a method for coating carbon nanotubes containing an insulation layer, capable of minimizing the amount of leakage at a suction surface of a vacuum suction apparatus, and the vacuum suction apparatus having an insulation layer formed by the carbon nanotube coating method. The method for coating carbon nanotubes containing an insulation layer according to the present invention comprises the steps of: preparing a suction unit made of a bare material which is not surface-treated or anodized; dissolving polymeric plastics in a solvent consisting of DMF, DMAc and/or NMP so as to prepare a plastic solution; coating the plastic solution onto the suction surface of the suction unit so as to form an insulation layer; mixing carbon nanotubes, a binder consisting of DMF, DMAc and NMP, and a solvent so as to prepare a carbon nanotube solution; and coating the carbon nanotube solution onto the insulation layer so as to form an antistatic layer.
申请公布号 KR101405524(B1) 申请公布日期 2014.06.11
申请号 KR20120062315 申请日期 2012.06.11
申请人 发明人
分类号 H01L21/02;H01L21/687 主分类号 H01L21/02
代理机构 代理人
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