发明名称 POLISHING COMPOSITION
摘要 <p>A polishing composition of the present invention is used for polishing an object containing a phase-change alloy and is characterized by containing ammonium ions (NH4+). The polishing composition may further contain abrasive grains, such as colloidal silica.</p>
申请公布号 KR20140071446(A) 申请公布日期 2014.06.11
申请号 KR20147010937 申请日期 2012.09.28
申请人 FUJIMI INCORPORATED 发明人 YOSHIZAKI YUKINOBU;IZAWA YOSHIHIRO
分类号 C09K3/14;B24B37/00;H01L21/304 主分类号 C09K3/14
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