| 摘要 |
The present invention relates to a cooling chamber for a glass holder of an in-line deposition equipment. The cooling chamber for a glass holder of an in-line deposition equipment according to the present invention comprises: a chamber (10) having a transfer unit (20); a shuttle (40) moved by the transfer unit (20); a glass holder (50) which is provided in the shuttle (40) and holds a glass (60) of a deposition target from the lower side; and a cooling unit (200) which is disposed on the lower side of the chamber (10) and cools the glass holder (50) by elevating when the glass holder(50) is entered. |
