发明名称 Charge storage device for detecting alpha particles
摘要 Systems and methods are described herein for detecting particles emitted by nuclear material. The systems comprise one or more semiconductor devices for detecting particles emitted from nuclear material. The semiconductor devices can comprise a charge storage element comprising several layers. A non-conductive charge storage layer enveloped on top and bottom by dielectric layers is mounted on a substrate. At least one top semiconductor layer can be placed on top of the top dielectric layer. A reactive material that reacts to particles, such as neutrons emitted from nuclear material, can be incorporated into the top semiconductor layer. When the reactive material reacts to a particle emitted from nuclear material, ions are generated that can alter the charge storage layer and enable detection of the particle.
申请公布号 US8748800(B2) 申请公布日期 2014.06.10
申请号 US201313786216 申请日期 2013.03.05
申请人 Spansion LLC 发明人 Hossain Timothy Z.;Clopton Patrick Mark;Foster Christopher;Lyons Christopher F.;Fulwood Clayton;Goodwin Greg Alan;Posey Dan E.
分类号 H01L31/00 主分类号 H01L31/00
代理机构 代理人
主权项 1. A device for detecting an alpha particle, the device comprising: a charge storage structure, the charge storage structure comprising: a first layer comprising silicon;a second layer located below the first layer, the second layer comprising a non-conductive material;a third layer located below the second layer, the third layer comprising: a non-conductive material, anda plurality of electrons giving the third layer a net negative charge, wherein the net negative charge changes in response to a presence of the alpha particle;a fourth layer located below the third layer, the fourth layer comprising a non-conductive material; anda fifth layer located below the fourth layer, the fifth layer comprising silicon.
地址 Sunnyvale CA US