Rotational rate sensor having intermeshing Coriolis elements

摘要

A rotational rate sensor includes: a substrate having a main plane of extension; a first Coriolis element; and a second Coriolis element. The first Coriolis element and the second Coriolis element have a first and a second center of gravity, respectively, and the elements are drivable along a drive direction. In the idle state of the rotational rate sensor, (i) the distance between the first center of gravity and the second center of gravity along the detection direction is less than a first value, and (ii) the distance between the first center of gravity and the second center of gravity along the third direction is less than a second value.

主权项

1. A rotational rate sensor, comprising:
a substrate having a main plane of extension; a first Coriolis element; and a second Coriolis element; wherein: the first Coriolis element and the second Coriolis element are configured to be driven along a drive direction; a first deflection of the first Coriolis element along a detection direction which runs perpendicular to the drive direction is detectable; a second deflection of the second Coriolis element along the detection direction is detectable; the first Coriolis element has a first center of gravity and the second Coriolis element has a second center of gravity; the first Coriolis element has a first extension along the drive direction, a second extension along the detection direction, and a third extension along a third direction running perpendicular to the drive direction and perpendicular to the detection direction; the second Coriolis element has a fourth extension along the drive direction, a fifth extension along the detection direction, and a sixth extension along the third direction; in the idle state of the rotational rate sensor, (i) the distance between the first center of gravity and the second center of gravity along the drive direction is less than 30% of the first extension and less than 30% of the fourth extension, and (ii) the distance between the first center of gravity and the second center of gravity along the detection direction is less than 30% of the second extension and less than 30% of the fifth extension, and (iii) the distance between the first center of gravity and the second center of gravity along the third direction is less than 30% of the third extension and less than 30% of the sixth extension.