发明名称 |
System and method for safeguarding wafers and photomasks |
摘要 |
A system and a method for safeguarding wafers and photomasks. The system includes a container for storing an article, the article being a wafer or a photomask; a flashing unit for flashing light with a pre-determined light pattern; an anti-theft unit capable of performing an anti-theft function, the anti-theft unit being attached to the container; and a trigger unit electrically connected to the anti-theft unit for triggering the anti-theft function of the anti-theft unit, in response to detecting the pre-determined light pattern of the flashing unit. The method includes providing a container having an anti-theft unit capable of performing an anti-theft function; storing an article in the container, the article being a wafer or a photomask; providing a flashing light with a pre-determined light pattern; detecting the pre-determined light pattern; and performing the anti-theft function by the anti-theft unit, in response to detecting the pre-determined light pattern. |
申请公布号 |
US8749388(B2) |
申请公布日期 |
2014.06.10 |
申请号 |
US201213655842 |
申请日期 |
2012.10.19 |
申请人 |
International Business Machines Corporation |
发明人 |
Hand Paul D.;Harmuth George M.;Leonardi Gary T.;Stefanski Glenn M.;Wyskida Andrew P. |
分类号 |
G08B13/14 |
主分类号 |
G08B13/14 |
代理机构 |
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代理人 |
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主权项 |
1. A system for safeguarding an article comprising:
a container for storing the article, wherein the article is a wafer or a photomask; a flashing unit for flashing light with a pre-determined light pattern; an anti-theft unit capable of performing an anti-theft function, the anti-theft unit being attached to the container; and a trigger unit electrically connected to the anti-theft unit for triggering the anti-theft function of the anti-theft unit, in response to detecting the pre-determined light pattern of the flashing unit, wherein the antitheft function comprises at least one of: i) breaking the wafer by inflation of an airbag and ii) destroying a metal pattern of the photomask by discharging electrical current on the photomask.
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地址 |
Armonk NY US |