发明名称 PATTERN GENERATION
摘要 FIELD: process engineering.SUBSTANCE: invention relates to generation of electron or photon pattern on substrate, application of fluoropolymer to this end, to method of pattern generation and to electron or photon device thus made. Proposed method comprises: formation of film of said electron or photon material on said substrate and application of said fluoropolymer for protection of said electron or photon material in pattern generation.EFFECT: ease of integration of proposed process with all common TFT architectures.44 cl, 18 dwg
申请公布号 RU2518084(C2) 申请公布日期 2014.06.10
申请号 RU20120104621 申请日期 2010.07.09
申请人 KEMBRIDZH EHNTERPRAJZ LIMITED 发明人 ZIRRINGKHAUS KHENNING;CHAN TSZUJ-FEHN';GVINNER MIKHAEHL'
分类号 H01L51/00;G03F7/00;H01L51/40 主分类号 H01L51/00
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