Microsensor produced in microsystem technologies for the measurement and/or detection of fouling

摘要

A sensor (10; 34) for measuring and/or detecting fouling that forms directly or indirectly on a so-called front surface of the sensor, includes the following in the form of a plurality of superimposed layers: —at least one heating element (14) that is able to diffuse, on command, a homogenous, monitored heat flow whose heat output is less than 200 mW, —a heat insulator (11) located on the side opposite the front surface of the sensor to prevent dissipation of the heat flow from the opposite side, —at least one temperature measuring element (16) that is placed in the homogenous heat flow diffused by the at least one heating element and that offers a precision of temperature measurement of better than 0.1° C., and —a substrate (12; 42) on which the layers of the at least one heating element and at least one temperature measuring element are connected.

主权项

1. A sensor for measuring and/or detecting the fouling that forms directly or indirectly on a front surface of the sensor that is exposed to fluid, wherein the sensor comprises the following in the form of a plurality of superimposed layers:
at least one heating element that is able to diffuse, on command, a homogenous, monitored heat flow whose heat output is essentially less than 200 mW, a heat insulator located on a side opposite the front surface of the sensor to prevent dissipation of the heat flow from said opposite side, at least one temperature measuring element that is placed in the homogenous heat flow diffused by said at least one heating element and that offers a precision of temperature measurement of better than 0.1° C., and a substrate on which the layers of said at least one heating element and at least one temperature measuring element are connected, wherein the substrate has opposite first and second surfaces, the heat insulator facing the first surface and the layer of said at least one heating element facing the second surface, the layer of said at least one temperature measuring element being superimposed on the layer of said at least one heating element.