发明名称 MASK FRAME ASSEMBLY FOR THIN FILM DEPOSITION
摘要 <p>Disclosed is a mask frame assembly for thin film deposition. The present invention includes: a mask frame which includes an opening part and surrounds the opening part; and a mask which includes a first surface facing a substrate for deposition and a second surface facing the first surface and is combined on the mask frame. A deformation preventing unit is formed on at least one region of the mask to differently form the thickness of the mask. The deformation of the mask due to wrinkles is minimized even though the mask is extended and is welded to the mask frame. Thereby, the quality of the deposition is improved by minimizing the adhesion failure of the mask on the substrate.</p>
申请公布号 KR20140070255(A) 申请公布日期 2014.06.10
申请号 KR20120138521 申请日期 2012.11.30
申请人 SAMSUNG DISPLAY CO., LTD. 发明人 OH, YOON CHAN;LEE, CHOONG HO
分类号 H01L51/56;H05B33/10 主分类号 H01L51/56
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