Combined motion control system

摘要

An examination and processing machine, in particular a lithography appliance, for use in the semiconductor industry, comprising a machine frame (1), an examination or processing device (5) for a work piece (4), a carriage (3) which is mounted on the machine frame (1) and can hold the work piece (4), a handling device (6) for positioning the work piece (4) on the carriage (3) and for removing it from the carriage (3), a series of oscillation isolators (2) for low-oscillation mounting of the machine frame (1), and individual control devices (30, 40, 20) for controlling the carriage (3), the handling device (6) and the oscillation isolators (2). These control devices (20, 30, 40) are subordinate to an overall control device (50), which acts as a host system, via a real-time bus (60).

主权项

1. An examination and processing machine for lithography applications comprising:
a machine frame; an inspection apparatus for examining a work piece wherein the work piece is a wafer; a carriage that is mounted on the machine frame, wherein the carriage can hold the work piece; a handling device for positioning the work piece on the carriage and for removing the work piece from the carriage; a series of oscillation isolators for low-oscillation mounting of the machine frame; and individual control devices, wherein the individual control devices comprise:
(i) a first control device for influencing the oscillation isolators,(ii) a second control device for controlling the carriage, and(iii) a third control device for controlling the handling device; and an overall control system for controlling the individual control devices; wherein the individual control devices are individual motion control subsystems for the overall control system; wherein the individual control devices are connected to one another and to the overall control system in real time via a bus device in order to match an operation of the carriage, the handling device, and the oscillating isolators to one another for vibration isolation; and wherein, at a same time that a process which produces oscillations is started by the second control device or the third control device, a feedforward signal is produced by the overall control system for the first control device in order to influence an actuator to counteract, by anticipation, oscillations on the machine frame.