| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a high pressure vessel etc. capable of forming a processing space achieving high level cleanliness.SOLUTION: In a high pressure vessel, treatment is performed on a substrate by a high pressure fluid. Further, a cavity part is formed by processing performed from one surface of a flat rectangular parallelepiped metal block 5 which is other than a widest area surface, and noble metal plating 7 is formed on an inner wall surface facing the cavity part to form a vessel body. In a case where the cavity part is formed as a through hole, a lid which opens and closes the cavity part is provided at the one side surface of the through hole and a second block which closes the cavity part in an airtight manner is provided on the other side surface.</p> |
