| 摘要 |
PURPOSE:To output a frequency signal with a high gauge factor corresponding to force, by providing a diffusion layer on a conductive substrate having elasticity and forming a bridge in the vicinity of said diffusion layer while providing the exciting means and vibration detection means of the bridge. CONSTITUTION:P<+>-diffusion layers 2, 2a are provided on a semiconductive substrate so as to provide a predetermined interval therebetween. When polysilicon formed thereafter is recrystallized and a protective film is selectively etched by fluoric acid, a bridge 4 can be formed onto the semiconductive substrate 1. If DC bias voltage is applied from an oscillation circuit 5 to perform positive feedback oscillation, the bridge 4 oscillates by inherent frequency. When this semiconductive substrate 1 receives strain by the reception of force, the bridge 4 also generates strain and, because oscillation frequency changes corresponding to the magnitude of said force, strain can be measured. |
