| 摘要 |
PROBLEM TO BE SOLVED: To provide a film forming apparatus and a film forming method for forming a layer consisting of graphene or a layer consisting of nanotube on a belt-like substrate travelling continuously.SOLUTION: The film forming apparatus comprising a processing roll 3 having a temperature gradient along an axial direction supported rotatably around a rotating axis 18 in a process chamber 2 in which a substrate 1 unwound from a first reel 6 is brought into contact to the outer surface of the processing roll 3 spirally to form the film onto it and the substrate 1' on which the film is formed is wound on a second reel 7, which comprises gas inlet/outlet portions 8, 9, 10 for generating gas streams 11, 12 substantially parallel to the rotating axis 18. |
