| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a pedestal structure capable of adjusting a reduction amount of thickness of a sheet which is a heat transfer medium, and maintaining the set reduction amount of the sheet thickness when mounting a focus ring, and a fixing method.SOLUTION: In order to make processing uniform, a heat-transfer sheet is interposed between a focus ring and a base part of a pedestal. A pressing member 60 of the pedestal structure includes a plurality of first abutted surfaces and a plurality of second abutted surfaces. The plurality of first abutted surfaces are provided at predetermined intervals in a circumferential direction. The plurality of second abutted surfaces are provided at predetermined intervals in the circumferential direction alternately with the plurality of first abutted surfaces. The plurality of first abutted surfaces and the plurality of second abutted surfaces are provided at different positions in a height direction, and a plurality of abutting surfaces protrude from the other portion of the pressing member 60 by a distance larger than a distance between the plurality of first abutted surfaces and the plurality of second abutted surfaces in the height direction. The pressing member 60 is abutted with a support part 62, thereby setting a reduction amount of the sheet.</p> |
