发明名称 PHOTOSENSITIVE RESIN COMPOSITION FOR RESIST MATERIAL, AND PHOTOSENSITIVE RESIN LAMINATE
摘要 Disclosed is a photosensitive resin composition for a resist material, which contains (A) 30-70% by mass of an alkali-soluble polymer, (B) 20-60% by mass of a compound that has an ethylenically unsaturated double bond, and (C) 0.1-20% by mass of a photopolymerization initiator. The photosensitive resin composition contains, as (B) the compound that has an ethylenically unsaturated double bond, (B-1) a compound that has at least a hydroxyl group, a phenyl group and two or more ethylenically unsaturated double bonds in each molecule, and (B-2) a compound that has an ethylene oxide group and a (meth)acryloyl group in each molecule.
申请公布号 KR20140069310(A) 申请公布日期 2014.06.09
申请号 KR20147011478 申请日期 2010.09.24
申请人 ASAHI KASEI E-MATERIALS CORPORATION 发明人 TSUTSUI YAMATO
分类号 G03F7/027;G03F7/004;H01L21/027 主分类号 G03F7/027
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