| 摘要 |
PROBLEM TO BE SOLVED: To provide a wavelength variable interference filter in which contact between reflection films can be suppressed even when a gap dimension between the reflection films is decreased, and to provide an optical filter device, an optical module, and an electronic apparatus.SOLUTION: A wavelength variable interference filter 5 includes a fixed substrate 51, a movable substrate 52, a fixed reflection film 54 disposed on the fixed substrate 51, and a movable reflection film 55 disposed on the movable substrate 52 and opposing to the fixed reflection film 54. The fixed substrate 51 includes a reflection film setting surface 512A and an electrode setting groove 511 enclosing an outer circumference of the reflection film setting surface 512A. The fixed reflection film 54 is disposed from the reflection film setting surface 512A to the electrode setting groove 511. |
